q=microelectromechanical+systems&searchType=standard&isFacet=true&view=standard&searchWay=subject&rows=10&sortWay=score&sortOrder=desc&searchWay0=marc&logical0=AND
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Microelectromechanical systems
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society of photo-optical instrumentationengineers
(6)
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society of photo-optical instrumentation engineers
(4)
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brand, oliver,
(3)
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american society of mechanical engineers
(2)
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fedder, g. k
(2)
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institute of electrical and electronics engineers
(2)
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johnson, eric g
(2)
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kaltenbacher, manfred,
(2)
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kraft, michael
(2)
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liu, chang
(2)
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materials research society
(2)
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sandia national laboratories
(2)
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semiconductor equipment and materials international
(2)
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solid state technology (organization)
(2)
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varadan, v. k.,
(2)
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aggarwal, priyanka
(1)
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air force research laboratory (wright-patterson air force base, ohio)
(1)
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allen, james j
(1)
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american society for mechanical engineers
(1)
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ananthasuresh, g. k
(1)
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