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Mems/Nems nano technology, selected, peer reviewed papers from the 12th Annual Conference of the Chinese Society of Micro-Nano technology and 2th International Conference of Chinese Society of Micro-Nano technology, October 22-24,2010, Xian, China /

ISBN/ISSN:
9783037851753
中图分类法 :
TB383-53
题名:
Mems/Nems nano technology, selected, peer reviewed papers from the 12th Annual Conference of the Chinese Society of Micro-Nano technology and 2th International Conference of Chinese Society of Micro-Nano technology, October 22-24,2010, Xian, China /
出版发行:
Switzerland : Trans Tech Publications, c2011.
载体形态:
xvi, 806 p. : ill. ; 25 cm.
主题词:
Microelectromechnical systems.
主题词:
Nanotechnology.
主要责任者:
Wang, Xiaohao.
标签:
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限定所在馆: 限定所在馆藏地点: 限定馆藏状态:
HEA|  |01038nam a2200205 a 450 
001|  |022012001770
005|  |20120831164001.3
008|  |120831s2011    sz a     b    101 0 eng d
020|  |▼a9783037851753
040|  |▼aWHUT▼cWHUT
093|  |▼aTB383-53▼25
111|2 |▼aAnnual Conference of the Chi-
   |  |nese Society of Micro-Nano tec-
   |  |hnology and 2th International -
   |  |Conference of Chinese Society -
   |  |of Micro-Nano Technology▼d(201-
   |  |0 :▼cXi\'an, China)
245|10|▼aMems/Nems nano technology, s-
   |  |elected, peer reviewed papers -
   |  |from the 12th Annual Conferenc-
   |  |e of the Chinese Society of Mi-
   |  |cro-Nano technology and 2th In-
   |  |ternational Conference of Chin-
   |  |ese Society of Micro-Nano tech-
   |  |nology, October 22-24,2010, Xi-
   |  |an, China /▼cedited by Xiaohao Wang.
260|  |▼aSwitzerland :▼bTrans Tech Pu-
   |  |blications,▼cc2011.
300|  |▼axvi, 806 p. :▼bill. ;▼c25 cm.
490|0 |▼aKey Engineering Materials, ▼-
   |  |x1013-9826 ;▼v.483
504|  |▼aIncludes bibliographical ref-
   |  |erences and index.
650| 0|▼aMicroelectromechnical systems.
650| 0|▼aNanotechnology.
700|1 |▼aWang, Xiaohao.
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