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| 公开/私有: | 公开 私有 |
标签:
用空格间隔多个标签,如:小说 文学 余秋雨
保存至书单:
Fundamentals of microfabrication and nanotechnology / |
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ISBN/ISSN:
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9780849331800 (set) |
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ISBN/ISSN:
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0849331803 (set) |
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ISBN/ISSN:
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9781420055115 (v. 1) |
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ISBN/ISSN:
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1420055119 (v. 1) |
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ISBN/ISSN:
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9781420055191 (v. 2) |
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ISBN/ISSN:
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1420055194 (v. 2) |
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ISBN/ISSN:
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9781420055160 (v. 3) |
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ISBN/ISSN:
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142005516X (v. 3) |
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中图分类法
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TN4 |
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著者:
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Madou, Marc J. |
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题名:
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Fundamentals of microfabrication and nanotechnology / |
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版次:
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3rd ed. |
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出版发行:
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Boca Raton, Fla. ; : CRC, c2012. |
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载体形态:
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3 v. : ill. (some col.) ; 29 cm. |
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附注:
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Rev. ed. of: Fundamentals of microfabrication. 2002. |
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主题词:
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Microelectronics. |
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主题词:
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Integrated circuits Design and construction. |
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主题词:
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Microelectromechanical systems Design and construction. |
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主题词:
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Machining. |
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主题词:
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Lasers Industrial applications. |
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主题词:
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Microelectronic packaging. |
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主题词:
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Microfabrication. |
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主题词:
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Nanostructured materials Design and construction. |
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主要责任者:
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Madou, Marc J. |
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标签:
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相关主题:
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分享资源:
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限定馆藏状态:
HEA| |01716cam a2200445 a 4500 001| |022012000146 003| |CAL 005| |20111013090626.1 008| |110519s2012 flua b 001 0 eng d 020| |▼a9780849331800 (set) 020| |▼a0849331803 (set) 020| |▼a9781420055115 (v. 1) 020| |▼a1420055119 (v. 1) 020| |▼a9781420055191 (v. 2) 020| |▼a1420055194 (v. 2) 020| |▼a9781420055160 (v. 3) 020| |▼a142005516X (v. 3) 040| |▼aUKMGB▼beng▼cUKMGB 050| 4|▼aTK7875▼b.M33 2012 082|04|▼a621.38152▼223 093| |▼aTN4▼24 099| |▼aCAL 022011298867 100|1 |▼aMadou, Marc J. 245|10|▼aFundamentals of microfabrica- | |tion and nanotechnology /▼cMar- | |c J. Madou. 250| |▼a3rd ed. 260| |▼aBoca Raton, Fla. ;▼aLondon :- | |▼bCRC,▼cc2012. 300| |▼a3 v. :▼bill. (some col.) ;▼c29 cm. 500| |▼aRev. ed. of: Fundamentals of- | | microfabrication. 2002. 504| |▼aIncludes bibliographical ref- | |erences and indexes. 505|0 |▼aV. 1. Solid-state physics, f- | |luidics, and analytical techni- | |ques in micro- and nanotechnol- | |ogy －－ v. 2. Manufacturing tec- | |hniques for microfabrication a- | |nd nanotechnology －－ v. 3. Fro- | |m MEMS to bio-MEMS and bio-NEM- | |S : manufacturing techniques a- | |nd applications. 650| 0|▼aMicroelectronics. 650| 0|▼aIntegrated circuits▼xDesign - | |and construction. 650| 0|▼aMicroelectromechanical syste- | |ms▼xDesign and construction. 650| 0|▼aMachining. 650| 0|▼aLasers▼xIndustrial applications. 650| 0|▼aMicroelectronic packaging. 650| 0|▼aMicrofabrication. 650| 0|▼aNanostructured materials▼xDe- | |sign and construction. 700|1 |▼aMadou, Marc J.▼tFundamentals- | | of microfabrication. 998| |▼aBUA
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