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用空格间隔多个标签,如:小说 文学 余秋雨
保存至书单:
Journal of vacuum science & technology. B,. Microelectronics processing and phenomena. |
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ISBN/ISSN:
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0734-211X |
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中图分类法
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TB13 |
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中图分类法
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O4 |
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题名:
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Journal of vacuum science & technology. |
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其它题名:
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Journal of vacuum science and technology. |
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其它题名:
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Microelectronics processing and phenomena. |
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出版发行:
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New York, N.Y. : Published for the Society by the American Institute of Physics, [1983-1990]. |
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载体形态:
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8 v. : ill. ; 29 cm. |
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附注:
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Title from cover. |
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附注:
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"An official journal of the American Vacuum Society." |
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主题词:
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Vacuum technology Periodicals. |
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标签:
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相关主题:
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分享资源:
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限定所在馆:
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限定馆藏状态:
HEA| |02706nas 2200601 450 001| |112001089879 003| |CAL 005| |20031017161259.0 008| |970129d19831990nyubr1p 0 a0eng 010| |▼a83642371 //r942▼zsn 82003446 022|0 |▼a0734-211X 030| |▼aJVTBD9 032| |▼a718090▼bUSPS 035| |▼a(OCoLC)8697479 037| |▼a534B0001-2 040| |▼aTsinghua University Library▼beng 042| |▼alc▼ansdp 050|00|▼aTJ940▼b.J669 082|0 |▼a621.5/5/05▼219 093| |▼aTB13▼24 093| |▼aO4▼24 098| |▼a534B0001-2 099| |▼aCAL 122001089879 210|0 |▼aJ. vac. sci. technol., B Mic- | |roelectron. process. phenom. 222| 0|▼aJournal of vacuum science & - | |technology. B, Microelectronic- | |s processing and phenomena. 245|00|▼aJournal of vacuum science & - | |technology.▼nB,▼pMicroelectron- | |ics processing and phenomena. 246|10|▼aJournal of vacuum science an- | |d technology.▼nB,▼pMicroelectr- | |onics processing and phenomena. 246|10|▼aMicroelectronics processing - | |and phenomena. 260| |▼aNew York, N.Y. :▼bPublished - | |for the Society by the America- | |n Institute of Physics,▼c[1983-1990]. 300| |▼a8 v. :▼bill. ;▼c29 cm. 310| |▼aBimonthly,▼b＜Jan./Feb. 1985-＞ 321| |▼aQuarterly,▼bJan.-Mar. 1983- 362|0 |▼a2nd ser., v. 1, no. 1 (Jan.－－ | |Mar. 1983)-2nd ser., v. 8, no.- | | 6 (Nov./Dec. 1990). 500| |▼aTitle from cover. 500| |▼a"An official journal of the - | |American Vacuum Society." 510|1 |▼aComputer & control abstracts- | |▼x0036-8113▼bJan.-March 1983- 510|1 |▼aElectrical & electronics abs- | |tracts▼x0036-8105▼bJan.-March 1983- 510|1 |▼aPhysics abstracts. Science a- | |bstracts. Series A▼x0036-8091▼- | |bJan.-March 1983- 510|1 |▼aSPIN▼b1983- 510|2 |▼aChemical abstracts▼x0009-2258. 510|2 |▼aCoal abstracts▼x0309-4979. 510|2 |▼aCurrent physics index▼x0098-9819. 510|2 |▼aMetals abstracts▼x0026-0924. 510|2 |▼aWorld aluminum abstracts▼x0002-6697. 530| |▼aIssued also on microfilm. 580| |▼aIncludes: International Symp- | |osium on Electron, Ion, and Ph- | |oton Beams. Proceedings of th- | |e ... International Symposium - | |on Electron, Ion, and Photon B- | |eams; and: Molecular Beam Epit- | |axy Workshop. Proceedings of - | |the ... Molecular Beam Epitaxy- | | Workshop, also issued separately. 650| 0|▼aVacuum technology▼xPeriodicals. 710|2 |▼aAmerican Vacuum Society. 710|2 |▼aAmerican Institute of Physics. 780|01|▼tJournal of vacuum science an- | |d technology▼x0022-5355. 785|00|▼tJournal of vacuum science & - | |technology. B, Microelectroni- | |cs and nanometer structures▼x1071-1023. 950| |▼aWHUTL▼fO4/101 999| 0|▼aCN▼bWHUTL▼c20030514▼Mqklj2▼m- | |20031017 16:12:59
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