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保存至书单:
Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / |
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ISBN/ISSN:
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3540124918 (Berlin) : 价格： RMB3.80 |
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ISBN/ISSN:
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0387124918 (U.S.) |
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中图分类法
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TN305.3 |
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题名:
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Ion implantation [equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 ] |
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出版发行:
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Berlin ; : Springer-Verlag, 1983. |
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载体形态:
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x, 556 p. : ill. ; 24 cm. |
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丛编:
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Springer series in electrophysics ; |
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主题词:
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Semiconductor doping Congresses. |
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主题词:
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Ion implantation Congresses. |
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主要责任者:
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Glawischnig, H. 1939- (Hans), |
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主要责任者:
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Ryssel, Heiner, 1941- |
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主要团体责任者:
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International Conference on Ion Implantation: Equipment and Techniques |
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标签:
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HEA| |01301nam 2200313 450 001| |021998013162 003| |CAL 005| |20050614135556.0 008| |830420s1983 wb a b 10100 eng 010| |▼a 83006689 //r84 020| |▼a3540124918 (Berlin) :▼cRMB3.80 020| |▼a0387124918 (U.S.) 050|00|▼aTK7871.85▼b.I5864 1983 082|00|▼a621.3815/2▼219 093| |▼aTN305.3▼23rd 094| |▼a53.650083▼22 245|00|▼aIon implantation :▼bequipmen- | |t and techniques : proceedings- | | of the Fourth International C- | |onference, Berchtesgaden, Fed.- | | Rep. of Germany, September 13- | |-17, 1982 /▼ceditors, H. Rysse- | |l and H. Glawischnig. 260| |▼aBerlin ;▼aNew York :▼bSpring- | |er-Verlag,▼c1983. 300| |▼ax, 556 p. :▼bill. ;▼c24 cm. 440| 0|▼aSpringer series in electroph- | |ysics ;▼vv. 11 504| |▼aIncludes bibliographical ref- | |erences and index. 650| 0|▼aSemiconductor doping▼xCongresses. 650| 0|▼aIon implantation▼xCongresses. 700|1 |▼aGlawischnig, H.▼q(Hans),▼d1939- 700|1 |▼aRyssel, Heiner,▼d1941- 711|2 |▼aInternational Conference on - | |Ion Implantation: Equipment an- | |d Techniques▼n(4th :▼d1982 :▼c- | |Berchtesgaden, Germany) 950| |▼awhutl▼f53.65083/R996 998| |▼aWUL 999| |▼tC▼Atshs22▼a20050614 13:55:07- | |▼Mtshs22▼m20050614 13:55:56▼Gt- | |shs22▼g20050614 13:56:17
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