HEA|  |01508nam  2200337 i 4500
001|  |021997013358
003|  |CAL
005|  |20050602105246.0
008|  |801217s1980    waua     b    10100 eng
010|  |▼a   80050727 //r852
020|  |▼a089252250X (pbk.)
035|  |▼aW102815-16 wl
040|  |▼cSJT
050|00|▼aTK7871.85▼b.S465
082|00|▼a621.381/71▼219
093|  |▼aTN405-53▼23
245|00|▼aSemiconductor microlithograp-
   |  |hy V /▼cJim Dey, editor ; pres-
   |  |ented by the Society of Photo－－
   |  |optical Instrumentation Engine-
   |  |ers in cooperation with the No-
   |  |rthern California Microphotoma-
   |  |sk/Masking Working Group and t-
   |  |he International Society for H-
   |  |ybrid Microelectronics, March -
   |  |17-18, 1980, San Jose, California.
260|  |▼aBellingham, Wash. :▼bSPIE,▼c1980.
300|  |▼aviii, 240 p. :▼bill. ;▼c28 cm.
490|1 |▼aProceedings of the Society o-
   |  |f Photo-optical Instrumentatio-
   |  |n Engineers ;▼vv. 221
504|  |▼aIncludes bibliographical ref-
   |  |erences and indexes.
650| 0|▼aSemiconductors▼xCongresses.
650| 0|▼aMicrolithography▼xCongresses.
700|1 |▼aDey, Jim.
710|2 |▼aSociety of Photo-optical Ins-
   |  |trumentation Engineers.
710|2 |▼aNorthern California Micropho-
   |  |tomask/Masking Working Group.
710|2 |▼aInternational Society for Hy-
   |  |brid Microelectronics.
830| 0|▼aProceedings of the Society o-
   |  |f Photo-optical Instrumentatio-
   |  |n Engineers ;▼vv. 221.
950|  |▼aJ▼fTS82-53/S678
998|  |▼aSJT
999|  |▼tC▼Atshs14▼a20050602 10:51:35-
   |  |▼Mtshs14▼m20050602 10:52:46▼Gt-
   |  |shs14▼g20050602 10:53:00

1. 温馨提示：只有“所在馆位置”为“社科自科借阅室、文学借阅室”且“馆藏状态”为“在馆”的图书才能借出，其他“馆藏地点”的书均不可借出。
2. “所在图书馆”为“典阅室”的图书只能在室内阅览。
3. 查询期刊“现刊架号”请查“报刊指南->期刊分类查询表”。